This high performance BA sensor is housed in a right angle stainless steel body. Enclosing the sensor in a right angle body significantly reduces the amount of deposition that would otherwise coat the sensor assembly. Unlike glass body ion gauges, the wide throat of the 8140EA provides excellent conductance. The sensor can be mounted in any orientation. This high performance sensor is based upon the proven ETI 8130 and 8140 nude gauge designs. It is available in single or dual thoria bonded filament configurations. The filament in the single filament model is spring tensioned. This sensor can be controlled by a Televac MM200 gauge controller.

 

Specifications:

 

Bakeable to 450°C.

Choice of degas methods (by model).

Bail mechanism securely retains cable in place.

Operating Range:

1x10^-3 to 4x10^-10 Torr - single filament version

1x10^-3 to 2x10^-11 Torr - dual filament version

Wetted Materials: Type 304 Stainless Steel, tungsten, thoria, ceramic.

Collector: 0.005” tungsten

Grid:

Tungsten helix - single filament version

Ta and Pt/Mo squirrel cage - dual filament version

Nitrogen Sensitivity:

10/Torr - single filament version

25/Torr - dual filament version

X-ray limit:

4x10^-10 Torr - single filament version

2x10^-11 Torr - dual filament version

Electron bombardment degas:

70 watts - single filament version

40 watts - dual filament version

Resistance heated degas: 6.3 - 7.5 volts @ 10 amps (single filament version only)

Maximum Continuous Bake Temperature: +450°C

Vacuum Interface: 2.75” CF Non-Rotatable Flange

Collector Potential: 0 volts

Shield Potential: n/a

Grid Potential: 150 to 180 volts

Filament Voltage: 3 to 5 volts

Filament Potential to Ground: 30 volts

 

Applications:

 

Physical Vapor Deposition

High Energy Physics

Ion Implant

Lamp, Lighting & Laser Products Mfg.

MOCVD

Mass Spectrometers

CRT Mfg.

Night Vision / Electro-Optical Detector Mfg.

Optical & Functional Films

Plasma Enhanced Deposition