Sapphire substrates

6"

Diameter

150.0 ±0.2mm

Thickness

1300±25μm

Orientation

C (0001) ±0.2°

TTV and Bow

<15nm; or on request

Front Surface

Epi polished

Back Side

Lapped or polished

Flatness

<15nm, or on request

Roughness (Ra)

<20/10nm, or on request

ORF

47.5 ±1.0mm

Primary Flat Location

A or M ±0.1°

Secondary Flat Location

90°to primary

Package

25-wafer cassette, or on request