Due to its application prospects in solar-blind ultraviolet detection, MgZnO alloy semiconductor films with suitable band gaps have attracted more and more attention. A series of MgxZn1-xO thin films with different compositions were prepared on M plane sapphire wafers by using low-pressure metalorganic chemical vapor deposition (LP-MOCVD).

 

CRYSCORE provides M plane (10-10) sapphire wafers with excellent surface quality. the roughness on the epi-polished side is lower than 0.5 nm.

Specifications of M-Plane (10-10) Sapphire Wafers

Item	2-inch M-plane(10-10) 430μm Sapphire Wafers
Crystal Materials	99,999%, High Purity, Monocrystalline Al2O3
Grade	Prime, Epi-Ready
Surface Orientation	M-plane(11-10)
Diameter	50.8 mm +/- 0.1 mm
Thickness	430 μm +/- 25 μm
Primary Flat Orientation	C-plane(0001) +/- 0.2°
Primary Flat Length	16.0 mm +/- 1.0 mm
Single Side Polished (SSP)	Front Surface	Epi-polished, Ra < 0.5 nm (by AFM)
	Back Surface	Fine ground, Ra = 0.8 μm to 1.2 μm
Double Side Polished (DSP)	Front Surface	Epi-polished, Ra < 0.5 nm (by AFM)
	Back Surface	Epi-polished, Ra < 0.5 nm (by AFM)
TTV	< 10 μm
BOW	< 10 μm
WARP	< 10 μm
Cleaning / Packaging	Class 100 cleanroom cleaning and vacuum packaging, 25 pieces in one cassette packaging or single piece packaging.

 

Note: Custom sapphire wafers with any orientation and any thickness can be provided.

 

Our sapphire wafer cost you less and help you to achieve more, contact us to get more information.

 

We have, and,RFQ today.