Product Main

Specifications

Purity 99.9999%

N2 ≤1 ppm

O2+Ar ≤1 ppm

H2O ≤0.5 ppm

CH4 ≤0.1 ppm

CO ≤0.1 ppm

CO2 ≤0.1 ppm

H2 ≤50 ppm

Disilane ≤1 ppm