Purity 99.9999%
N2 ≤1 ppm
O2+Ar ≤1 ppm
H2O ≤0.5 ppm
CH4 ≤0.1 ppm
CO ≤0.1 ppm
CO2 ≤0.1 ppm
H2 ≤50 ppm
Disilane ≤1 ppm
Purity 99.9999%
N2 ≤1 ppm
O2+Ar ≤1 ppm
H2O ≤0.5 ppm
CH4 ≤0.1 ppm
CO ≤0.1 ppm
CO2 ≤0.1 ppm
H2 ≤50 ppm
Disilane ≤1 ppm