Vacuum Chamber Inner Size | Φ1000×1500mm2 |
Ultimate Vacuum Pressure | <1.3×10-3Pa |
Pump Down Time(from atmosphere down to6.7×10-3Pa) | <20min |
Number of Arc ion Evaporator | 8sets |
Number of Large Rectangular Magnetron Sputtering Sources | 2 sets |
Effective Coating Space | Φ750×1100mm2 |
Coating Cycle(Dec/Tool) | 50/180min |
Total Electric Consumption (380V, 50Hz) | 70KW |
Cooling Water Consumption | 3 Ton/hr |
Sapce Occupation | 7×8×3m3 |
Application | Decoration and Tool |