Mono wafer(125mm× 125mm)
Dimension 125± 0.5mm
Diameter 150± 0.5mm
Thickness 200± 20μm
Resistivity 1-3Ω. Cm
Life Time ≥ 10μs
Oxygen Concentration ≤ 1× 1018atoms/cm3
Carbon Concentration ≤ 5χ 1016atoms/cm3
Warpage&Bow ≤ 50μm
TTV ≤ 35μm
Saw Marks Depth ≤ 10μm