Mono wafer(156mm× 56mm)
Dimension 156± 0.5mm
Diameter 200± 0.5mm
Thickness 200± 20μm
Resistivity 1-3Ω. Cm
Life Time ≥ 10μs
Oxygen Concentration ≤ 1× 1018atoms/cm3
Carbon Concentration ≤ 5χ 1016atoms/cm3
Warpage & Bow ≤ 75μm
TTV ≤ 40μm
Saw Marks Depth ≤ 10μm
Dimension 156± 0.5mm
Diameter 200± 0.5mm
Thickness 200± 20μm
Resistivity 1-3Ω. Cm
Life Time ≥ 10μs
Oxygen Concentration ≤ 1× 1018atoms/cm3
Carbon Concentration ≤ 5χ 1016atoms/cm3
Warpage & Bow ≤ 75μm
TTV ≤ 40μm
Saw Marks Depth ≤ 10μm