1）Mainly applied in solar wafer’s wet chemical processing to decoat PSG. 2）Configured by body, processing tanks, servo systems, transfor arm, electronical control system, CDS and other parts;

3）Mains supply including HF, N2, Compress Air, DIW, Exhaust Outlet and Drain;

4）Material: Depending on process and customer requirement, available matierials eg. PP, PVC, PVDF, Quartz Tube, Stainless steel and others;

Features and benefits:

A. Module design; Depending on customer requriment and process, offer special solution;

B. Customization based on customer budget;

C. Optimum wet cleaning solution;

D. High PPR;

E. Various options available: ;

F. Operator friendly and safe;

G. Easy maintenance;

Non-standard product, please contact for special process solution with your requirement.