This LDSS is very easy to install on the pipe without any cutting the Flow pipe.

And Check the delicate flow of liquid and sensing the liquid flow compare the normal status.

This system prevents from wafer loss by abnormality of liquid flow. And protection mass loses of wafers by sensing and check of the liquid flow.

 

Specification

-. Sensing range : sensing the abnormality by checking the delicate change of 0.01 cc volume ( 1 ~ 60cc)

-. Input voltage : ( 1 ~ 5 V DC)

-. Pipe Diameter : 2 ~ 6 mm

Configuration ;

-.Liquid Dispensing Status Sensor

-. Controller

-. PC & Control program

Sensing attribute ; ( Sensing the abnormality of Liquid Flow )

-. Sensing the change of the delicate liquid flow

-. Check the air bubble in the liquid flow

-. Check the malfunction of distribution liquid pump

-. Check the liquid Valve operation

-. Check the abnormal status of the liquid floe pipe

-. Check the change the viscosty

-. Check the leak of the liquid flow

 

l  Advantages;

-.One touch easy installation without pipe cutting- non contact

-. Sensing and check by real time

-. Non pollution/ corrosion by non contact sensing and checking

-. Applicable to the Track system and PR Dispenser system (PR coating and developer system) in the Semiconductor /LED /LCD Process.

-. To the PCB Epoxy coater, MEMS Epoxy coater and pharmaceuticals and BIO system.

-. To all industrials which is required the liquid Dispenser system and process.

This system was approved by Korean Big Semiconductor company and applied in his Fab process to get a good quality and to prevent wafer losses.