Description
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-. Fast and Stable pumping for coating
-. Automation from pre-melting to hydrophobic
-. Easy running and maintenance
-. High yield per batch
-. High performance of machine.
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Specification
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-. Chamber size : 800 ~ 1300 mm
-. Row Vacuum Pump : Oil Rotary Pump / Dry pump
_. High Vacuum Pump : oil Diffusion pump
-. PolyCold ; Water Cryo pump(Chamber), Cold trap for oil Vapor(DP)
-. Substrate Fixturing : Sector Dome/ Planatery Fizture
-. Thickness Monitor : QCM Alone / QCM & OPM
-. Process Control : HOPE developed by Hanil
-. Evaporation Source : Electron Beam/ Ion Source / RHS
-. Heater : Halogen / Micro sheathed heater
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Advantages of Products
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-. Remarkable reproducibility
-. Hi uniformity
-. Hi productivity
-. Fast and stable pumping and durability
-. Easy to operate by user friendly designed control panel
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Application
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-. RGB color filter
-. IR cut filter
-. Narrow band pass filter
-. Beam splitter
-. AR coating
-. Multi level coating for Glass/PMMA
-. Half mirror coating
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