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Specifications

Purity :               99.999%
Guaranteed Specification:                           
Oxygen                            ≤ 1ppmv
Nitrogen                          ≤ 3ppmv
Carbon Dioxide             ≤ 3ppmv
Carbon Monoxide         ≤ 0.5ppmv
Methane                         ≤ 2ppmv
Water                               ≤ 1ppmv