Hardwares PVD vacuum coating machine
Hardwares PVD vacuum coating machine can be used to coat metal film, TiN, TiC, ZrN, CrN, Ti, Ni, Cr, Cu and other compounds film, multi-layer super-hard film, nitrogen-doped titanium film and the alloy film, and in a very short time to complete all the machining process, it is a highly efficient multi-functional coating equipment.
Technical parameter:
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Mode
Dimension
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HAWK-1250
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HAWK-1600
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HAWK-1800
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1250*1500mm
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1600*1800mm
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1800*1800mm
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Coating mode and main confirguration
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Twelve multi-arc targets
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Twenty multi-arc targets
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Twenty two multi-arc targets
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Power source
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Electric-arc power, Filament power,
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Process gas control
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Mass flowmeter + Electromagnetic ceramic valve
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Vacuum chamber structure
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Vertical side opening door, pump system postposition, double water cooling
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Vacuum system
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Molecule pump +Roots pump +Mechanical pump(8.0*10-5Pa)
Diffusion pump +Roots pump +Mechanical pump(8.0*10-4Pa)
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Workpiece baking temperature
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Normal temperature to 350 centi-degree PID control, radiation heating.
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Workpiece motion mode
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Public rotation Frequency control: 0-20 rotation per minute
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Measure mode
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Number display composite vacuum gauge: from atmosphere to 1.0*10-5Pa
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Control mode
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Manual/Automatic/PC/PLC + HMI/PC four choice of control mode
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Remark
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We can design the dimension of the equipment according to customers special technique requirement.
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