PVD Coating machine for tools
This machine is applied in coating hard metal membrane and membrane metal compounds on the surface of tools, molds,dies, metal, glass, ceramics, building materials, and other surface treatment industry.
Main Features:
1.The vacuum chamber is a vertical type single door structure made of stainless steel. Chamber sizeΦ1400~2500mm
2.The vacuum system is composed of mechanical pump, roots pump, and diffusion pump.
3.Coating system for 10~28 arc or 1~4 arc column or plane arc.
4.High power pulse bias power source.
5.Inflating system has 1~4 sets mass flow control instrument and a gas flow display.
6.The electrical control system is equipped with sound and light alarm devices for circuit overload, water cutoff and air cutoff.
7.The control system (touch screen + PLC) displays detailed parameters at real time and controls the entire production process fully automatically under automatic running mode.
Technical Parameters:
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Gross weight
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4000kg-8000kg
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Total power
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100KW-180KW
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Suction rate (idling)
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8×10-3Pa≤20min
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Ultimate vacuum (idling)
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≤8×10-4Pa
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Gas leak rate (idling)
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0.67Pa/Hr
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Work piece rotating speed
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≥05r/min
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Baking temperature
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room temperature350
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