| Sino Wafer Electronic Material Co.,Ltd. | ||||||
| Material | Fused silica/Borofloat/B270 etc | |||||
| spec | unit | 3" | 4" | 5" | 6" | |
| Diameter/size(or square) | mm | 76.2 | 100 | 125 | 150 | |
| Tol(±) | mm | 0.25 | 0.5 | 0.5 | 0.5 | |
| Thickness | mm | 0.10mm or more | 0.18mm or more | 0.30mm or more | 0.50mm or more | |
| Primary reference flat | mm | 22mm or customized | 32.5mm or customized | 42.5mm or customized | 57.5mm or customized | |
| LTV (5mmx5mm) | µm | < 2 | < 2 | < 2 | < 2 | |
| TTV | µm | < 8 | < 10 | < 15 | < 20 | |
| Bow | µm | ±20 | ±25 | ±40 | ±40 | |
| Warp | µm | ≤ 30 | ≤ 40 | ≤ 50 | ≤ 50 | |
| PLTV | % | ≥90%(5mm*5mm) | ≥90%(5mm*5mm) | ≥90%(5mm*5mm) | ≥90%(5mm*5mm) | |
| Edge Rounding | mm | Compliant with SEMI M1.2 Standard/refer to IEC62276 | ||||
| Surface Type | Single Side Polished /Double Sides Polished | |||||
| Polished side Ra | nm | ≤1 | ||||
| Back Side Criteria | µm | general 0.2-0.5 or as customized | ||||
| Appearance | Contamination, | None | ||||
| Particles ￠>0.3 µ m | <= 30 | |||||
| Saw Marks, striations | None | |||||
| Scratch | None | |||||
| Cracks, crowsfeet, saw marks, stains | None | |||||
| we can also customize according to your needs, if you have any enquiry | ||||||
| please feel free to contact us. | ||||||
