4640
Fluoro Rubber O-ring
Fluoro rubber molded into O-ring cross section. Colored types (white, brown) are also available.
Seal for machinery that needs heat, chemical or oil resistance.
• JIS B 2401
• AS 568B
• ISO/R 1799, 1800
• NAS 1593, 1594, 1595, 1516
(NRF4640)
NEW RUBBERFLON Fluoro Rubber O-ring
No.4640 with surface modified for increased strength
Low-friction surface offers no adhesion with other parts or machine. O-rings can be installed automatically and continuously. Used mainly as static seal.
• JIS B 2401
• AS 568B
• ISO/R 1799, 1800
• NAS 1593, 1594, 1595, 1516
H4640
Heat resistant fluoro rubber O-ring
Heat resistant fluoro rubber ring formed with O-shaped cross-section (Black).
The heat resistant fluoro rubber has significantly higher permanent compression set characteristics than conventional general-purpose fluoro rubber seal products. Its longer seal life promises an extended maintenance cycle.
• JIS B 2401
• AS 568B
AC4640
ARMOR CRYSTAL O-ring
Armor Crystal molded into O-ring cross section (transparent). Particle action grade
No filler is used, which makes the O-ring highly pure. Low adhesion to metal and superior plasma-resistance allows the AC4640 to be used in dry etching/ashing equipment and CVD equipment for semiconductor and LCD equipment.
Maximum temperature approx.
160
• JIS B 2401
• AS 568B
F4640
FLID O-ring
Flid molded into O-ring cross section (black). Standard popular grade
Superior mechanical properties allow the O-ring to be used for sealing vacuum gates of semiconductor and LCD equipment, and for conveyor belt.
Maximum temperature approx.
200
• JIS B 2401
• AS 568B
FA4640
FLID ARMOR O-ring
Flid Armor molded into O-ring cross section (black). Special low-friction grade
Superior mechanical properties and low adhesion to metal. Used mainly for sealing vacuum gates of semiconductor or LCD equipment.
Maximum temperature approx.
200
• JIS B 2401
• AS 568B
SA4640
SPOQ ARMOR
O-ring
Spoq Armor molded into O-ring cross section (white). Anti-plasma grade
Superior in purity, plasma resistance, and low adhesion to quartz. Used in dry etching/ashing equipment and CVD equipment for semiconductor and LCD equipment.
Maximum temperature approx.
200
• JIS B 2401
• AS 568B
HA4640
HYREC ARMOR O-ring
HYAREC ARMOR ring formed with O-shaped cross-section (transparent amber). Plasma resistant grade.
Excels in purity, plasma resistance, heat resistance and adhesion resistance against metal (for stationary part only). Used in dry etching, ashing and CVD devices for semiconductor and liquid crystal equipment.
Standard maximum operating temperature :
220
• JIS B 2401
• AS 568B
UA4640
ULTIC ARMOR O-ring
Rings of ULTIC ARMOR formed with O-shaped cross-section (transparent amber). Plasma resistant grade.
Excels in purity, plasma resistance, heat resistance and adhesion resistance against metal. Used in dry etching, ashing and CVD devices for semiconductor and liquid crystal equipment.
Standard maximum service temperature :
220
• JIS B 2401
• AS 568B
LA4640
LABE ARMOR O-ring
LABE ARMOR ring formed with O-shaped cross-section (blue).
For O2 plasma resistant grade only.
Excels in resistance to O2 plasma and adhesion resistance against quartz. Used in ashing devices for semiconductor and liquid crystal equipment.
Standard maximum service temperature :
200
• JIS B 2401
• AS 568B
WD4640
ARCURY AD O-ring
ARCURY AD ring formed with O-shaped cross-section (transparent amber). For acid resistance applications.
Excels in resistance to acid solution and provides high purity due to lowest extraction of metals and organics. Used in wafer and glass substrate cleaning equipment, spin coaters, spin developers and chemical carrier tank seals.
• JIS B 2401
• AS 568B
WL4640
ARCURY AL O-ring
ARCURY AL ring formed with O-shaped cross-section (black). For alkaline resistance applications.
Excels in resistance to alkaline solvents including ammonia for which conventional fluoro rubber cannot be used. Used in wafer and glass substrate cleaning equipment, spin coaters, spin developers and chemical carrier tank seals.
• JIS B 2401
• AS 568B
WO4640
ARCURY SO O-ring
ARCURY SO ring formed with O-shaped cross-section (white). For resistance to ketone, ester and amine.
Excels in resistance to polar organic solvent including ketone, ester and amine. Used in wafer and glass substrate cleaning equipment, spin coaters, spin developers and chemical carrier tank seals.
• JIS B 2401
• AS 568B
OZT4640
ARCURY OZT O-ring
ARCURY OZT ring formed with O-shaped cross-section (transparent). For resistance to ozone
Excels in resistance to ozone gas and water and provides high purity due to lowest extraction of metals and organics. Used in ozone cleaning systems, ozone generators and ozone decomposition systems.
• JIS B 2401
• AS 568B
OZW4640
ARCURY OZW O-ring
ARCURY OZW ring formed with O-shaped cross-section (white). For resistance to ozone.
Excels in resistance to ozone gas and water and provides higher heat resistance than OZT. Used in ozone cleaning systems, ozone generators and ozone decomposition systems.
• JIS B 2401
• AS 568B
VP4640
Fluoritz-SB
Fluoritz SB, a perfluoroelastomer, formed with O-shaped cross-section (black). Extremely excellent resistance to chemicals.
Used in areas requiring high resistance to chemicals for semiconductor, liquid crystal, chemical and electric/electronic industries.
• JIS B 2401
• AS 568B
VPH4640
Fluoritz-HR
Fluoritz HR, a perfluoroelastomer, formed with O-shaped cross-section (black).
Extremely excellent resistance to chemicals as well as heat.
Used in areas requiring high thermal resistance for semiconductor and liquid crystal equipment (PE-CVD, LP-CVD and diffusion furnace) and in automobile, chemical and energy sectors.
• JIS B 2401
• AS 568B
5640
Silicone Rubber
O-ring
Silicone rubber molded into O-ring cross section
Used as static seals under a wide temperature range
• JIS B 2401
• AS 568B
• ISO/R 1799,1800
P9640
TOUGHRETHANE O-ring
Urethane rubber molded into O-ring cross section
Used mainly as high-pressure seal
Fluoro Rubber O-ring
Fluoro rubber molded into O-ring cross section. Colored types (white, brown) are also available.
Seal for machinery that needs heat, chemical or oil resistance.
• JIS B 2401
• AS 568B
• ISO/R 1799, 1800
• NAS 1593, 1594, 1595, 1516
(NRF4640)
NEW RUBBERFLON Fluoro Rubber O-ring
No.4640 with surface modified for increased strength
Low-friction surface offers no adhesion with other parts or machine. O-rings can be installed automatically and continuously. Used mainly as static seal.
• JIS B 2401
• AS 568B
• ISO/R 1799, 1800
• NAS 1593, 1594, 1595, 1516
H4640
Heat resistant fluoro rubber O-ring
Heat resistant fluoro rubber ring formed with O-shaped cross-section (Black).
The heat resistant fluoro rubber has significantly higher permanent compression set characteristics than conventional general-purpose fluoro rubber seal products. Its longer seal life promises an extended maintenance cycle.
• JIS B 2401
• AS 568B
AC4640
ARMOR CRYSTAL O-ring
Armor Crystal molded into O-ring cross section (transparent). Particle action grade
No filler is used, which makes the O-ring highly pure. Low adhesion to metal and superior plasma-resistance allows the AC4640 to be used in dry etching/ashing equipment and CVD equipment for semiconductor and LCD equipment.
Maximum temperature approx.
160
• JIS B 2401
• AS 568B
F4640
FLID O-ring
Flid molded into O-ring cross section (black). Standard popular grade
Superior mechanical properties allow the O-ring to be used for sealing vacuum gates of semiconductor and LCD equipment, and for conveyor belt.
Maximum temperature approx.
200
• JIS B 2401
• AS 568B
FA4640
FLID ARMOR O-ring
Flid Armor molded into O-ring cross section (black). Special low-friction grade
Superior mechanical properties and low adhesion to metal. Used mainly for sealing vacuum gates of semiconductor or LCD equipment.
Maximum temperature approx.
200
• JIS B 2401
• AS 568B
SA4640
SPOQ ARMOR
O-ring
Spoq Armor molded into O-ring cross section (white). Anti-plasma grade
Superior in purity, plasma resistance, and low adhesion to quartz. Used in dry etching/ashing equipment and CVD equipment for semiconductor and LCD equipment.
Maximum temperature approx.
200
• JIS B 2401
• AS 568B
HA4640
HYREC ARMOR O-ring
HYAREC ARMOR ring formed with O-shaped cross-section (transparent amber). Plasma resistant grade.
Excels in purity, plasma resistance, heat resistance and adhesion resistance against metal (for stationary part only). Used in dry etching, ashing and CVD devices for semiconductor and liquid crystal equipment.
Standard maximum operating temperature :
220
• JIS B 2401
• AS 568B
UA4640
ULTIC ARMOR O-ring
Rings of ULTIC ARMOR formed with O-shaped cross-section (transparent amber). Plasma resistant grade.
Excels in purity, plasma resistance, heat resistance and adhesion resistance against metal. Used in dry etching, ashing and CVD devices for semiconductor and liquid crystal equipment.
Standard maximum service temperature :
220
• JIS B 2401
• AS 568B
LA4640
LABE ARMOR O-ring
LABE ARMOR ring formed with O-shaped cross-section (blue).
For O2 plasma resistant grade only.
Excels in resistance to O2 plasma and adhesion resistance against quartz. Used in ashing devices for semiconductor and liquid crystal equipment.
Standard maximum service temperature :
200
• JIS B 2401
• AS 568B
WD4640
ARCURY AD O-ring
ARCURY AD ring formed with O-shaped cross-section (transparent amber). For acid resistance applications.
Excels in resistance to acid solution and provides high purity due to lowest extraction of metals and organics. Used in wafer and glass substrate cleaning equipment, spin coaters, spin developers and chemical carrier tank seals.
• JIS B 2401
• AS 568B
WL4640
ARCURY AL O-ring
ARCURY AL ring formed with O-shaped cross-section (black). For alkaline resistance applications.
Excels in resistance to alkaline solvents including ammonia for which conventional fluoro rubber cannot be used. Used in wafer and glass substrate cleaning equipment, spin coaters, spin developers and chemical carrier tank seals.
• JIS B 2401
• AS 568B
WO4640
ARCURY SO O-ring
ARCURY SO ring formed with O-shaped cross-section (white). For resistance to ketone, ester and amine.
Excels in resistance to polar organic solvent including ketone, ester and amine. Used in wafer and glass substrate cleaning equipment, spin coaters, spin developers and chemical carrier tank seals.
• JIS B 2401
• AS 568B
OZT4640
ARCURY OZT O-ring
ARCURY OZT ring formed with O-shaped cross-section (transparent). For resistance to ozone
Excels in resistance to ozone gas and water and provides high purity due to lowest extraction of metals and organics. Used in ozone cleaning systems, ozone generators and ozone decomposition systems.
• JIS B 2401
• AS 568B
OZW4640
ARCURY OZW O-ring
ARCURY OZW ring formed with O-shaped cross-section (white). For resistance to ozone.
Excels in resistance to ozone gas and water and provides higher heat resistance than OZT. Used in ozone cleaning systems, ozone generators and ozone decomposition systems.
• JIS B 2401
• AS 568B
VP4640
Fluoritz-SB
Fluoritz SB, a perfluoroelastomer, formed with O-shaped cross-section (black). Extremely excellent resistance to chemicals.
Used in areas requiring high resistance to chemicals for semiconductor, liquid crystal, chemical and electric/electronic industries.
• JIS B 2401
• AS 568B
VPH4640
Fluoritz-HR
Fluoritz HR, a perfluoroelastomer, formed with O-shaped cross-section (black).
Extremely excellent resistance to chemicals as well as heat.
Used in areas requiring high thermal resistance for semiconductor and liquid crystal equipment (PE-CVD, LP-CVD and diffusion furnace) and in automobile, chemical and energy sectors.
• JIS B 2401
• AS 568B
5640
Silicone Rubber
O-ring
Silicone rubber molded into O-ring cross section
Used as static seals under a wide temperature range
• JIS B 2401
• AS 568B
• ISO/R 1799,1800
P9640
TOUGHRETHANE O-ring
Urethane rubber molded into O-ring cross section
Used mainly as high-pressure seal