|
Material |
Fused silica/Borofloat/B270 etc |
|
spec |
unit |
3" |
4" |
5" |
6" |
|
Diameter/size(or square) |
mm |
76.2 |
100 |
125 |
150 |
|
Tol(±) |
mm |
0.25 |
0.5 |
0.5 |
0.5 |
|
Thickness |
mm |
0.10mm or more |
0.18mm or more |
0.30mm or more |
0.50mm or more |
|
Primary reference flat |
mm |
22mm or customized |
32.5mm or customized |
42.5mm or customized |
57.5mm or customized |
|
LTV (5mmx5mm) |
µm |
< 2 |
< 2 |
< 2 |
< 2 |
|
TTV |
µm |
< 8 |
< 10 |
< 15 |
< 20 |
|
Bow |
µm |
±20 |
±25 |
±40 |
±40 |
|
Warp |
µm |
≤ 30 |
≤ 40 |
≤ 50 |
≤ 50 |
|
PLTV |
% |
≥90%(5mm*5mm) |
≥90%(5mm*5mm) |
≥90%(5mm*5mm) |
≥90%(5mm*5mm) |
|
Edge Rounding |
mm |
Compliant with SEMI M1.2 Standard/refer to IEC62276 |
|
Surface Type |
|
Single Side Polished /Double Sides Polished |
|
Polished side Ra |
nm |
≤1 |
|
Back Side Criteria |
µm |
general 0.2-0.5 or as customized |
|
Appearance |
Contamination, |
None |
|
Particles ￠>0.3 µ m |
<= 30 |
|
Saw Marks, striations |
None |
|
Scratch |
None |
|
Cracks, crowsfeet, saw marks, stains |
None |
