Purity Grade 99.9%~99.999%
Formula CH3F
Application
It is used in the manufacture of semiconductor and electronic products. In the presence of an RF field fluoromethane will dissociate into fluoride ions that selectively etch silicon compound films.
Alternative Name Freon 41,Methyl fluoride,Halocarbon 41,Monofluoromethane
Molecular Weight 34.03g/ mol
CAS No. 593-53-3
Package 44L 49L