|
Name
|
Silicon target
|
|
Type
|
Mono /poly
|
|
Purity
|
5N/6N
|
|
Density
|
2.33g/cm3
|
|
Conductivity type
|
N/P
|
|
Specification
|
|
|
Length
|
310mm max
|
|
Width
|
200mm max
|
|
Diameter
|
270mm max
|
|
Thickness
|
2-12mm
|
|
Tolerance
|
±0.1mm
|
|
Specific Resistance
|
0.005-0.02 ohm.cm
|
|
1-10 ohm.cm
|
|
|
10 ohm.cm min
|
|
