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Electronic grade hydrofluoric acid
Quality Standard:
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Item
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Index
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EL
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UP
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UP-S
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Hydrogen Fluoride (HF), w/ %
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49±0.5
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49±0.5
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49±0.5
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Color, hazen ≤
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≤10
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≤10
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≤10
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Silicofluoric Acid, H2SIF6 ppb ≤
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≤100000 ppb
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≤20000 ppb
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≤20000 ppb
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Chloride, Cl ppb ≤
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≤5000 ppb
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≤5000 ppb
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≤500 ppb
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Nitrate, NO3 ppb ≤
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≤3000 ppb
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≤3000 ppb
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≤300 ppb
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Phosphate, PO4 ppb ≤
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≤1000 ppb
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≤1000 ppb
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≤100 ppb
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Sulfite, SO3 ppb ≤
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≤5000 ppb
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≤2000 ppb
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≤200 ppb
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Sulfate, SO4 ppb ≤
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≤500 ppb
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≤200 ppb
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Al ppb ≤
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≤100 ppb
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≤10 ppb
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≤1 ppb
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As ppb ≤
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≤50 ppb
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≤10 ppb
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≤1 ppb
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Ba ppb ≤
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≤100 ppb
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≤10 ppb
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≤1 ppb
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Be ppb ≤
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≤20 ppb
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≤5 ppb
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≤1 ppb
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Bi ppb ≤
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≤20 ppb
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≤5 ppb
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≤1 ppb
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Cd ppb ≤
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≤50 ppb
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≤10 ppb
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≤1 ppb
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Ca ppb ≤
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≤100 ppb
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≤10 ppb
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≤1 ppb
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Cr ppb ≤
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≤20 ppb
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≤10 ppb
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≤1 ppb
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Co ppb ≤
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≤20 ppb
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≤10 ppb
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≤1 ppb
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Cu ppb ≤
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≤20 ppb
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≤10 ppb
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≤1 ppb
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Ga ppb ≤
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≤20 ppb
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≤10 ppb
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≤1 ppb
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Ge ppb ≤
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≤20 ppb
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≤10 ppb
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≤1 ppb
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Au ppb ≤
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≤20 ppb
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≤5 ppb
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≤1 ppb
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Fe ppb ≤
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≤100 ppb
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≤10 ppb
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≤1 ppb
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Pb ppb ≤
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≤50 ppb
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≤10 ppb
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≤1 ppb
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Li ppb ≤
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≤20 ppb
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≤5 ppb
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≤1 ppb
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Mg ppb ≤
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≤100 ppb
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≤10 ppb
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≤1 ppb
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Mn ppb ≤
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≤100 ppb
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≤10 ppb
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≤1 ppb
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Mo ppb ≤
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≤20 ppb
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≤10 ppb
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≤1 ppb
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Ni ppb ≤
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≤50 ppb
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≤10 ppb
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≤1 ppb
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K ppb ≤
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≤100 ppb
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≤10 ppb
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≤1 ppb
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Ag ppb ≤
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≤20 ppb
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≤5 ppb
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≤1 ppb
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Na ppb ≤
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≤100 ppb
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≤10 ppb
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≤1 ppb
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Pt ppb ≤
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≤100 ppb
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≤10 ppb
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≤1 ppb
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Sr ppb ≤
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--
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--
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--
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Tl ppb ≤
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--
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≤10 ppb
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≤1 ppb
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Sn ppb ≤
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≤20 ppb
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≤10 ppb
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≤1 ppb
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Sb ppb ≤
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--
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≤10 ppb
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≤1 ppb
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Ti ppb ≤
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≤100 ppb
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≤10 ppb
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≤1 ppb
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V ppb ≤
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--
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≤10 ppb
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≤1 ppb
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Zn ppb ≤
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≤100 ppb
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≤10 ppb
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≤1 ppb
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Granules ( ≥ 0.5 μm) p/ml ≤
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≤25
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≤25
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≤25
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Granules ( ≥ 0.3 μm) p/ml ≤
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--
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150
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150
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Granules ( ≥ 0.2 μm) p/ml ≤
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--
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--
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--
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Molecular formula: HF
Molecular weight: 20.01
Properties: The product is a colorless and transparent solution. It has a strongly pungent odor and a strong toxicity. It is very corrosive.
Application: The product is a electronic chemical. It is used for washing and etching in making VLSI wafer, solar battery, LED and TET-LCD faceplate, It's also used in atomic energy industry chemical reagent.
Storage: The product should be stored in a storehouse with good ventilation.
Transport: It should be treated as Grade A inorganic acid corrosive goods during its transportation. Avoid heating or getting wet in the rain. Slightly load and unload. Avoid striking.
Packing: The product is filled in a 25 kg polythene plastic drum; Also fill it on consumer requests.
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