Product Main

Specifications

description: 
product name:
Large diameter quartz tube
 
 
  Specificationφ80-200mm,Si02≥99.95%,Al,Ca,Mg,K,Na,Ti,Li,Ni,Cu,B,Cr total content≤45ppm.The product has excellent thermal,electric insulation performance,diaphanous performance,acid proof,widely used in high-tech of semiconductor,solar energy technology,fiber communication,laser technology,spaceflight technology,national defence war industry and optics chemical industry etc,and we can processed into various shapes of crucible.
Typical elements(unit:ppm):
Al
Fe
K
Na
Li
Ca
Mg
Cu
Mn
Pb
B
Cr
Ti
Oh
25
2.0
2.0
3.0
3.0
1.0
1.0
0.1
0.1
0.1
0.2
0.1
2.0
1-150

  For customer’s request to select quartz materials with quality reliable,stable performance from UNM, through strict quality control, produce various quartz ware for the semiconductor.
1, Quartz tube of various specifications of  the Semiconductor (furnace core tube)
2, Quartz tube of various specifications of the quartz boat (wafer carriers)
3, Delivery system of various quartz (boat rock, cantalever etc)
4, Various of quartz glass instrument, for example various Specifications of tank cleaning, bell jar,ball joint,portfire,Cassettes etc
5, Production of solar silicon wafers with a device with a load.
UNIMIN element content(unit:ppm):
Al
Fe
K
Na
Li
Ca
Mg
Cu
Mn
Pb
B
Cr
Ti
Oh
16
0.3
0.7
0.8
0.6
0.3
0.1
0.05
0.05
0.01
0.2
0.1
1.2
1-150
Size and tolerance of large diameter quartz tube:
OD and Tolerance
80-280(±mm)
WT and Tolerance
1-10(±mm) 
Siding
(℅)
Ovality
(℅)
Bow
(‰)
OD
Tolerance
Tolerance
80
±1.0
±0.5
15
2.0
3
100
±1.5
±0.8
15
2.0
3
120
±2.0
±1.0
20
2.5
3
160
±3.0
±1.0
25
2.5
3
180
±4.0
±1.5
25
2.5
3
200
±4.0
±1.5
25
2.5
3
240
±6.0
±2.0
25
2.5
3
280
±8.0
±3.0
25
2.5
3