• • • Overview of Product • • •
MS327 series of vacuum / absolute pressure transducer is a new series of product specially used for vacuum measuring control released in China by German HELM, which fully has solved the problem of difficult vacuum measurement. This series of product has three variants i.e. MS327 negative pressure transducer, MS327A absolute pressure transducer, MS327 capacitor thin – membrane absolute pressure transducer, which has widely been used for such fields as pharmaceutical, medical equipment, airspace and aerospace, scientific research, leakage detection, accessories of automation equipment.
MS327G negative pressure transducer adopts HELM mono – crystalline silicon thick – membrane sensor, provided with high – accuracy signal processing circuit, with performance stability and reliability, which has solved such disadvantages of domestic diffused silicon – type negative vacuum product as unstable signal and short service life. The normal ranges are 0 ~ 100KPa and 0 ~ 50KPa etc.
MS327A negative pressure transducer adopts such new high technologies of German HELM as advanced absolute pressure chip, temperature automatic compensation, and normalized circuit commissioning etc. to expand the absolute pressure range to 5KPa, as a minimal, and to greatly enhance the overall accuracy of the product. This variant features advanced technology, superior performance, reliable quality, small dimensions. It features more advantages and high ratio of performance to cost comparing with the same type of domestic absolute pressure product.
MS327CA capacitor thin – membrane absolute pressure transducer is a vacuum pressure gauge made in China through introduction of capacitor thin – membrane from German HELM and internationally advanced calibration and production equipment. This product adopts the capacitor capacity changing principle to work, of which minimum scale may be up to 0.02MPa ~ 200MPa of absolute pressure, without influenced by the category and composite of the medium to be detected when detecting, with output of standard electrical signal, may be remote transferring, easily intellectual control by micro – processor. It is ideal for measurement of low vacuum pressure.
• • • Features of Product • • •
1. Fully provided with German HELL made high – accuracy sensing elements, with maximum accuracy up to 0.1% FS
2. Stable and reliable performance, may be continuously operated for a long time, with good long – term stability
3. May apply to measure corrosive medium under special requirements
4. Strong overloading immunity
5. Fast response
6. May be used for hazardous site, with intrinsically safe type Ex ia II CT5
7. Structural diversification, design may be customized at the customer’s special requirements.
• • • Application of Product • • •
It has widely been used for such fields as pharmaceutical, medical equipment, airspace and aerospace, scientific research, leakage detection, accessories of automation equipment.
• • • Technical Data• • •
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Medium to be measured
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The gas or liquid, and compatible with 316 stainless steel
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Type of pressure
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Negative gauge pressure (G), silicon – type absolute pressure (A), capacitor thin – membrane absolute pressure (CA)
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Overloading capacity
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Two times for negative gauge pressure, several dozens to several hundred times for micro - scale absolute pressure
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Measuring range
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Negative gauge pressure: 0 ~ -5KPa…-_50KPa…-100Kpa
Silicon – type absolute pressure: 0 ~ 5KPa…10KPa…20KPa0 ~ 100KPa…200KPa…1Mpa
Capacitor thin – membrane absolute pressure: 0.02Pa ~ 200Pa. 1Pa ~ 1KPa
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Overall accuracy
Non - linear, repeatability, lagging
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± 0.1% FS
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± 0.25% FS
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± 0.5% FS
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Long – term stability
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Typical: ± 0.1% FS
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Maximum: ± 0.15% FS
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Range of operating temperature
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-20~+85°C
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Range of Compensating temperature
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-10~+60°C
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Ambient temperature
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-20~+80°C
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Zero point temperature drifting
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Typical: ± 0.01% FS / °C
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Maximum: ± 0.015% FS / °C
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Sensitivity temperature drifting
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Typical: ± 0.01% FS / °C
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Maximum: ± 0.015% FS / °C
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Range of power supplying
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12 ~ 36V DC ( generally 24V DC)
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Signal output
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4~20mA / 1-5V DC / 0~5V DC
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Load resistance
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≤(U - 15) / 0.02Ω
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Enclosure protection degree
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Plug type (IP65); cable type (IP67)
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Safe explosion – proof
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Ex ia II CT5
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Response time (10% ~ 90%)
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≤2ms
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Weight
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Approx. 500g
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Tolerance of vibration
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< 0.1% FS(Mechanical vibration frequency in 20Hz~1000Hz)
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Signal wire connecting hole
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Cable hole is¢8
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Dielectric strength / RF degree
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EN 50081–1; EN 50082–2; IEC 61000–4–3
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Pressure connection
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See product selection table and process connecting drawing (may be defined by the customer).
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Electrical wiring connection
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See product selection table and process connecting drawing (may be defined by the customer).
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Structural material
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1Cr18Ni9Ti
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Sealing structure
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NBR, PTFE or Fluorubber
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