It is widely used in crystal lamps, horologe, glasses frame, mobile shell, hardware, sanitary ware, dishware, cutter & mould which require antifriction and extra hard films. It can be used for coating TiN, TiCN, CrN, TiALN, TiNbu, TiCrN, ZrN, TiNC and DLC film.
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Model
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ZCK-1150 magnetron sputtering coater
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Chamber size
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Φ1150x1200
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Fixture size
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9shafts,Φ220x900 top rotation
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Pumping time
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From atmosphere 8x10-3Pa<12min unloaded
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Ultimate vacuum
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≤4x10-4Pa
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Voltaic arc source
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8pieces 2KW
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Mid-frequency target
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1pair 30KW
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Monopole pulse negative bias
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20KW100-1000V 20A 50V-500V 40A
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Baking temperature
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350 thermostatic control
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Vacuum system
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KT-400(2 sets)/F400/3500 Molecular pump(2 sets),ZJP-300, 2X-70
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Inflation system
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Three ways mass flow controller (500ccm two ways and 1000ccm one way)
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Filament ionized system
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Filament heating: 10kw heater bias: 3kw
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Heating system
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18KW
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Total / average power
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50KW/30KW
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Used for
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Hardware, mobile and electronics
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Remark
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Can be designed according to customers request
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