Feature:
- 1. F-Theta scan lens is widely used in micro material processing , such as drilling, dicing, fine cutting, structuring, perforating, marking and welding.
- 2. Our high precision F-Theta lens can achieve large flat field image with high performance.
- 3. The diffraction-limited performance of the scan lenses results in minimum spot sizes with high uniformity over the whole scan field.
- 4. Our F-theta scan lenses are delivered with highly durable anti-reflection coated protective windows to avoid contamination of the front lenses during the process.
- 5. In conjunction with appropriate scan systems, our scan lenses allow precise imaging for highly accurate micro-machining.
Specification:
| Specifications of F-Theta Lens | |||
| Type | ZLAS-F100-W1064-S61-D87-V1 | ZLAS-F160-W1064-S100-D140-V2 | ZLAS-F254-W1064-S175-D248-V1 |
| Focal Length | 100mm | 162mm | 254mm |
| Back Focal Length | 117.40mm | 194.62mm | 298.75mm |
| Work Wavelenght | 1.064um | 1.064um | 1.064um |
| Scan angle | +/- 25 degree | +/- 25 degree | +/- 28 degree |
| scan field size(diam.) | 87mm | 140mm | 248mm |
| Square field size | 61*61mm | 100*100mm | 175*175mm |
| Incident beam diam.(Max.) | 10mm | 12mm | 16mm |
| Rcommended Mirror Separation | 10mm | 16mm | 16mm |
| Y mirror distance | 9mm | 16mm | 18mm |
| X mirror distance | 19mm | 32mm | 34mm |
| Encircled Energy (80% energy) | 10um | 12.5um | 15um |
| Max. Diameter of lenses | 44mm | 66mm | 88mm |
| Construction | 4 pcs | 4 pcs | 4 pcs |
| Mounting thread | M85*1 | M85*1 |
M85*1 |

