Brand Name: | Kejia |
---|---|
Model Number: | Lab CVD tube furnace |
Place of Origin: | China (Mainland) |
size: | customized |
furnace material: | alumina fiber for insulation |
Quick Details
Specifications
Model:KJ-1700C
CVD tube furnace
Display:LCD
Maximum
Working Temperature:1700°C(<4 hours)
Standard
Working Temperature:1600°C(continuous)
Heating
Rate:suggestion<=10°C
Temperature:Accuracy±1°C
Heating
Element:MoSi2
Thermocouple:B
Type
Fused
quartz tube size:O.D:50XI.D:45XLength:1000 mm
O.D:60XI.D:55XLength:1000
mm
O.D:80XI.D:74mmXLength:1000
mm
Heating
zone : Total heating zone length: 440mm
Constant
temperature zone : 200mm(±1°C)
Vacuum
level:10^-2 torr by mechanical vacuum pump.
10^-5
torr by molecular pump.
Leak
rate < 5 mtorr / min.
Gas
flow meter and pressure meter :Three gas flow-meters (4% accuracy FS) are
installed inside mobile case which are able to monitor gases flowing rate (three
different kinds of gases in total)
A.
Compact direct read flow meter, 10-100 cc/min.
B.
Compact direct read flow meter, 16-160 cc/min.
C.
Compact direct read flow meter, 25-250 cc/min.?Four pressure meters are
installed inside mobile cart which are able to monitor three types of flowing
gases pressure as well as the pressure of mixing
tank.
Max.
Power :4.5KW
Working
Voltage:AC220V/110V single phase, 50/60 Hz
Temperature
Control:PID automatic control via SCR (Silicon Controlled Rectifier) power
control, with 50steps programmable
Communication
interface : Rs485
Outside
Size : 630×460×560mm