| Brand Name: | Ruihua |
|---|---|
| Purity: | 99.9%-99.999% |
| Grade Standard: | Electron Grade,Industrial Grade |
| Place of Origin: | China (Mainland) |
| Other Names: | SF6 |
| CAS No.: | 2551-62-4 |
Quick Details
Specifications
Description
Sulfur Hexafluoride,SF6 is a colorless, nonflammable, liquefied, compressed gas
Sulfur Hexafluoride,SF6 is a colorless, nonflammable, liquefied, compressed gas
Gas Data
Molecular Weight 146.05
Specific Gravity(Air=1) 5.1
Applications
Fluorine source for high density plasma etching: offers high selectivity without generating
carbon by-products.
Specifications
| SF6 |
| Property | Unit | Minimum | Maximum |
| SF6 | %vol | 99.999 | -- |
| O2 | ppmv | -- | 1 |
| N2 | ppmv | -- | 3 |
| CO | ppmv | -- | 0.5 |
| CO2 | ppmv | -- | 1 |
| CF4 | ppmv | -- | 2 |
| H2O | ppmv | -- | 2 |
| HF | ppmv | -- | 0.1 |
| THC(CH4) | ppmv | -- | 1 |
Package
Cylinder Size DOT3AA 2265-47L/DOT3AA 2265-43L
Valve CGA 580 / 590
This is common cylinders sizes.RUIHUA fills customer owned cylinders.
Shipping Information
DOT Label Green, Nonflammable Gas
DOT Class 2.2
CAS No.: 2551-62-4
UN Number 1080