| Machine Type: | Industrial Vacuum Cleaner |
|---|---|
| After-sales Service Provided: | Engineers available to service machinery overseas |
| Dimension(L*W*H): | customized |
| Power(W): | 100 |
| Voltage: | 220V |
| Material: | plasma cleaner |
| Industry Used: | plasma cleaner |
| Cleaning Type: | plasma cleaner |
| Cleaning Process: | plasma cleaner |
| Use: | plasma cleaner |
| Certification: | CE |
| Fuel: | Electric |
| Feature: | plasma clean |
| Model Number: | PT |
| Brand Name: | Protech |
| Place of Origin: | China (Mainland) |
| Condition: | New |
| Model: | PT-DZ-2LC |
| Input power: | AC 110V-220V for your option |
| The max. current: | <=1.2A (vacuum pump not included) |
| RF frequency: | 40KHz ( offset not more than 0.2KHz) |
| Concrete resistance protection: | <50 Omega |
| Vacuum degree: | 30Pa~100Pa |
| Flow range: | 10~100mL/min adjustable |
| Processing control: | MCU manual or automatic for your option |
| Cleaning time: | 1~6000s adjustable |
| Inside chamber size: | Dia. 100mmx270mm |
Quick Details
Specifications
Protech plasma cleaner with vacuum pump PT-DZ-2LC
Application
It is used to clean and remove the nanoscale organic contamination on wafer with Argon, Oxygen, or mix gas plasma. The rate of organic removal is about 10 nm/min Max. at PF power.
Outstanding features
Plasma cleaner
Cleaning nanoscale organic contamination
Equipped with vacuum pump
Adjustable RF power
Safe operation and environmental friendly
Suitable for most of the materials such as, metal, semi conductor, oxidate, and most of the high polymer material, etc.
Main technical specification
Model PT-DZ-2LC
Input power AC 110V-220V for your option
The max. current <=1.2A (vacuum pump not included)
RF frequency 40KHz ( offset not more than 0.2KHz)
Concrete resistance protection <50 Omega
Vacuum degree 30Pa~100Pa
Flow range 10~100mL/min adjustable
Processing control MCU manual or automatic for your option
Cleaning time 1~6000s adjustable
Inside chamber size Dia. 100mmx270mm
Gas source input Two way basic gas flow control (or more ways for your option)
The gas can be Ar, oxygen, air, etc.