| Classification: | Laboratory Heating Equipments |
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| Place of Origin: | China (Mainland) |
| Model Number: | PT-1200T |
| Brand Name: | Protech |
| Max. temperature: | 1100.C |
| Constant temperature range: | 100.C~1100.C |
| Temperature accuracy: | +/-1.C |
| Heating zone: | ID.55xL300mm length |
| Heating tube: | OD.60X1200mm |
| Max. Heating rate: | 50.C/s |
| Max. Cooling rate: | 64.C/min at vacuum 200mtorr, 117.C/min at atmosphere status |
| Temperature control: | Programmable and PID automatic control |
| Operating interface: | Large size touch panel |
| Gas mixer: | Gas mixing tank |
Quick Details
Specifications
Protech CVD system with rapid thermal processing furnace
A) Brief introduction
The equipment consists of a rapid thermal processing furnace, cooling system, gas mixer, and vacuum system.
For fastest heating, the furnace may be pre-heated to a desired temperature and then be slided to the sample's position. As for fastest cooling, the furnace can be slided to another side after sample heating is completed.
B) Outstanding features
1) quick heating and cooling furnace max. heating and cooling rates up to 100°C/min
2) Single rail to control the sliding of the furnace
3) Max. Temperature 1100.C
4) Gas mixer to put into gas, or gas mixer (If there is explosive or corrosive gas, please tell us in advance)
5) Vacuum system to keep a high vacuum degree
6) Flange with water cooling
C) Main Parts and technical specification
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Model |
PT-1200T-60IK |
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1) Heating reactor |
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Max. temperature |
1100.C |
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Constant temperature range |
100.C~1100.C |
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Temperature accuracy |
+/-1.C |
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Heating zone |
ID.55xL300mm length |
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Heating tube |
OD.60X1200mm |
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Max. Heating rate |
50.C/s The furnace requires water cooling in long running times at temperature >600.C |
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Max. Cooling rate |
64.C/min at vacuum 200mtorr, 117.C/min at atmosphere status |
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Temperature control |
Programmable and PID automatic control |
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Operating interface |
Large size touch panel |
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Flange |
A pair of SS vacuum flange with high temperature O rings to keep a high vacuum |
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Sliding rails / Table |
Double sliding rail made by Cr plated steel Sliding length: 1200mm |
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2)Gas mixer |
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Three channel of accurate mass flowmeters(MFC) to digital display and accurately control the gas flow |
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MFC 1 flow range |
0~100sccm |
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MFC 2 flow range |
0~200sccm |
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MFC 3 flow range |
0~500sccm Each MFC is controlled by separate stainless steel needle valve |
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Measuring accuracy |
+/-0.2% |
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Gas inlet and outlet |
1/4" card sleeve connection |
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Gas mixer |
Gas mixing tank |
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3) Vacuum system |
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Mechanical vacuum pump |
Equipped with relative connectors and vacuum bellow |
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Max. Vacuum |
5~10Pa (For higher vacuum degree, please let me know.) |
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4) Cooling system |
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Cooling chiller to connect the water cooling flange with relative tubes |
circulating water rate:0.5M3/h |
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