1) vacuum chamber body materials used SUS304, polishing a vacuum chamber wall treatment, the outer wall of polished bead blasting process.
2) using an independent gate valve between the vacuum chamber - flapper valve apart, can effectively cut off, stabilize the process gas. At present our company adopt the flapper valve design, it seals better, more durable than the current domestic common flap valve.
3) the drive uses a magnetic guide, protect the stability of the drive. for each speed the entire production line frequency control motor drive, running speed can be adjusted.
4) Electrical Control System: Data touch screen and PLC automatic control, man-machine dialogue to achieve the system's display, operation and control parameters
1) the ultimate vacuum pressure: 6 1 0E-4 PA
2) the average production cycle: According to product identified
3) the substrate holder size: can be customized according to requirements
4) the film uniformity: ± 3% of advanced mobile field technology has greatly enhanced the target utilization
Segmented heating design is conducive to process optimization