Nitrogen Trifluoride NF3


CAS No.: 7783-54-2
EINECS No.: 232-007-1
UN No.: UN2451
Purity: 99.99%-99.995%
Dot Class: 2.2
Appearance: Colorless
Grade Standard: Electron Grade, Industrial Grade

Etching:
Nitrogen Trifluoride is used in the plasma etching of silicon wafers.

Material:
Nitrogen Trifluoride can be used as well with tungsten silicide, and tungsten produced by CVD

Laser:
Nitrogen Trifluoride is also used in hydrogen fluoride and deuterium fluoride lasers, which are types of chemical lasers.