1.  Adoption of integrated granite-material guide ways makes sure of stable thermal performance of themselves;

2.  The mechanical structure has the Characteristics of strong rigidity and small geometric errors;

3.  Adoption of collision-avoidance protection improves measurement's safety;

4.  21 terms of compensation technique as to mechanical geometric errors improve the machine's precision greatly;

5.  Y-Axis guide way adopts dove tail type, which has high precision and good stability;

6.  Z-axis adopts cylinder equilibrator system, which improves orientation precision and stability greatly for Z axis;

7.  Adoption of advanced F. E.M (finite element method) makes it have a stable and reliable resistance of effective deformation.