Feature/Function:

*Integrated design, less occupied area, competitive price, stable performance and low maintenance costs;

*Equipped with 4~6 groups of evaporation sources, compatible with Organic evaporation and inorganic evaporation, multi-source Co-evaporation obtain composite film/partial evaporation obtain Multi-layer film, powerful and stable performance;   

*Suitable for laboratory preparation of metal mono film, semiconductor Film, organic film, also can be used for pre-production process test, Etc.;

*Suitable for organic combination of evaporation coating and glove box Environment, to achieve evaporation, encapsulation, testing and other Process seamless docking, widely used in perovskite solar cell/OPV Organic solar cell, OLED film and other research systems, etc..

 

Application:It is widely used in the research and small batch preparation of new Film materials for colleges & universities, research institutes and Enterprises.

 

Technical Parameters:

Equipment Name:       Thermal Evaporator with Glove-box

Model:                           ZHDS400

Coating Method:           Multi-source evaporation coating

Chamber Structure:      Box-type front and rear door structure, equipped with glovebox

Chamber Size:               L400W440H450mm

Baking Temperature:     Room temperature to 300

Rotating Substrate Holder:            120mm120mm

Substrate Holder Lift:                       Manually adjust the lifting height between 0-80mm

Film Thickness Nonuniformity:         5.0%

Evaporation Source:      2 Groups of metal sources, 2~4 Groups of organic sources

Control Method:             PLC control

Occupied Area:                (Mainframe)   L1100W780H1800mm,Glovebox size custom

Power:                              10kW