Feature/Function:

* Integrated design, less occupied area, competitive price, stable performance and low maintenance costs;
* Suitable for laboratory preparation of metal mono-membrane, Semiconductor film, organic film, also can be used for pre-production Process test;
* Suitable for the preparation of optical film, conductive film, semiconductor film, ferroelectric film, etc.;

 

Application:Colleges & universities, research institutes and enterprises develop new thin film materials and samll batch production.

 

Technical Parameters:

Equipment Name:       E-beam Evaporator

Model:                          TEMD500

Chamber Structure:     Vertical cylindrical side door structure, rear pumping system

Chamber Size:               500H650mm

Baking Temperature:                       Room temperature to 300

Rotating Substrate Holder:              Flat-plate 200mm

Film Thickness Nonuniformity:        5.0%

Kaufman Ion Source:                       Optional

Evaporation Source:        4~6 Cave crucibles(optional)/2 groups of evaporation sources

Control Method:              PLC Control/IPC automatic control(optional)

Occupied Area:                (Mainframe) L1500W850H1750mm

Power:                               20kW