| Brand Name: | CoreMorrow |
|---|---|
| Accuracy: | Nanometer scale |
| Magnification: | not fixed |
| Measuring Time: | no |
| Single Prism: | no |
| Model Number: | P60.X250 |
| Place of Origin: | China (Mainland) |
| Driving voltage: | 0 to 150V |
| Travel range: | 0 to 250um |
Quick Details
Specifications
Charateristics:
Closed-loop version for high accuracy Anti-vibration design Differential drive
High/low-temperature/vacuum version available Fast response
Technical Data:
Type |
P60.X250S |
P60.X250K |
Units | |
Active axes |
X |
X |
| |
Driving channels |
2 |
2 |
| |
Travel range(0~120V) |
±130 |
±130 |
Μm±10% | |
Travel range(0~150V) |
±165 |
±165 |
Μm±10% | |
Sensor |
SGS |
- |
| |
Resolution |
9 |
3 |
nm | |
Linearity |
0.1 |
- |
%F.S. | |
Repeatability |
0.04 |
- |
%F.S. | |
Pitch/yaw/roll |
<10 |
<10 |
μrad | |
Push/pull force |
300/30 |
300/30 |
N | |
Stiffness |
1.2 |
1.2 |
N/μm±20% | |
Unloaded resonant frequency |
490 |
490 |
Hz±20% | |
Unloaded step time |
80 |
40 |
Ms±20% | |
Load capacity |
0.6 |
0.6 |
kg | |
El. Capacitance |
24.6 |
24.6 |
ΜF±20% | |
Operating temperature |
-40~+80 |
-40~+80 |
°C | |
Anti-vibration design |
Half sine wave |
15g, 11ms |
15g, 11ms |
|
Back peak sawtooth wave |
20g, 11ms |
20g, 11ms | ||
Material |
Steel, Aluminum |
Steel, Aluminum |
| |
Mass |
950 |
950 |
g±5% | |
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