| Brand Name: | CoreMorrow |
|---|---|
| Accuracy: | nanometer scale |
| Magnification: | no |
| Measuring Time: | no |
| Single Prism: | no |
| Model Number: | P63 |
| Place of Origin: | China (Mainland) |
| Travel: | 0 to 8um |
| Driving voltage: | 0 to 150V |
Quick Details
Specifications
P63 is a small-volume 1~3 axes piezo nanopositioning stage. It features ultra-precision and very compact. the size of XYZ version is only 303042mm (only 303021mm for X version) and is very easy to integrate into any scanning instrument.
P63 is an ultra-high precision nanopositioning system. It is designed for AFM, SPM, STM and other micro-scanning nano-operations.
Technical Data
Type |
S-closed loop K-open loop |
P63.X7S P63.X7K |
P63.Z7S P63.Z7K |
P63.XY7S P63.XY7K |
P63.XZ7S P63.XZ7K |
P63.XYZ7S P63.XYZ7K |
Units |
Active axes |
X |
Z |
X, Y |
X, Z |
X, Y, Z |
| |
Travel range(0~120V) |
5.5 |
5.5 |
5.5/axis |
5.5/axis |
5.5/axis |
Μm±10% | |
Travel range(0~150V) |
6.8 |
6.8 |
6.8/axis |
6.8/axis |
6.8/axis |
Μm±10% | |
Sensor |
SGS/- |
SGS/- |
SGS/- |
SGS/- |
SGS/- |
| |
Closed/open-loop resolution |
0.2/0.1 |
0.2/0.1 |
0.2/0.1 |
0.2/0.1 |
0.2/0.1 |
nm | |
Closed-loop linearity |
0.4/- |
0.4/- |
0.4/- |
0.4/- |
0.4/- |
%F.S. | |
Repeatability |
0.2/- |
0.2/- |
0.2/- |
0.2/- |
0.2/- |
%F.S. | |
Pitch/yaw/roll |
<5 |
<5 |
<10 |
<10 |
<15 |
rad | |
Push/pull force capacity |
10/2 |
12/2 |
8/2 |
9/2 |
7/2 |
N | |
Stiffness |
1.5 |
2 |
X1.2/Y1.4 |
X1.2/Z1.5 |
X0.9/Y1/Z1.2 |
N/μm±20% | |
Unloaded resonant frequency |
2 |
2.5 |
X1.3/Y1.9 |
X1.5/Z1.6 |
X0.9/Y0.95/Z1.2 |
KHz±20% | |
Closed/open-loop unloaded step time |
1.5/0.3 |
1.5/0.3 |
1.5/0.3 |
1.5/0.3 |
1.5/0.3 |
Ms±20% | |
Load capacity |
0.8 |
0.8 |
0.5 |
0.5 |
0.4 |
kg | |
El. Capacitance |
0.8 |
0.8 |
0.8/axis |
0.8/axis |
0.8/axis |
ΜF±20% | |
Material |
Aluminum |
Aluminum |
Aluminum |
Aluminum |
Aluminum |
| |
Mass |
70 |
70 |
120 |
120 |
160 |
g±5% | |
Type |
S-closed loop K-open loop |
P63.X18S P63.X18K |
P63.Z8S P63.Z8K |
P63.XY18S P63.XY18K |
P63.X18Z8S P63.X18Z8K |
P63.XY18Z8S P63.XY18Z8K |
Units |
Active axes |
X |
Z |
X, Y |
X, Z |
X, Y, Z |
| |
Travel range(0~120V) |
16 |
6 |
16/axis |
X16, Z6 |
XY16, Z6 |
Μm±10% | |
Travel range(0~150V) |
18 |
8 |
18/axis |
X18, Z8 |
XY18, Z8 |
Μm±10% | |
Sensor |
SGS/- |
SGS/- |
SGS/- |
SGS/- |
SGS/- |
| |
Closed/open loop resolution |
0.6/0.2 |
0.2/0.1 |
0.6/0.2 |
X0.6/0.2, Z0.2/0.1 |
XY0.6/0.2, Z0.2/0.1 |
nm | |
Closed-loop linearity |
0.3/- |
1/- |
0.3/- |
X0.3, Z1/- |
XY0.3, Z1/- |
%F.S. | |
Repeatability |
0.25/- |
0.25/- |
0.25/- |
0.25/- |
0.25/- |
%F.S. | |
Pitch/yaw/roll |
≤15 |
≤15 |
≤15 |
≤15 |
≤15 |
rad | |
Unloaded resonant frequency |
2 |
1 |
2 |
X2/Z1 |
X2/Y2/Z1 |
KHz±20% | |
Closed/open-loop unloaded step time |
8/0.5 |
8/0.5 |
8/0.5 |
8/0.5 |
8/0.5 |
Ms±20% | |
Load capacity |
0.5 |
0.5 |
0.5 |
0.5 |
0.5 |
kg | |
El. Capacitance |
1.8 |
0.8 |
1.8 |
X1.8, Z0.8 |
XY1.8, Z0.8 |
ΜF±20% | |
Operating temperature |
-20~80 |
-20~80 |
-20~80 |
-20~80 |
-20~80 |
°C | |
Material |
Aluminum |
Aluminum |
Aluminum |
Aluminum |
Aluminum |
| |
Cable length |
1.5 |
1.5 |
1.5 |
1.5 |
1.5 |
M±10mm | |
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